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Jiaozuo TreTrt Materials Co., Ltd.
[China]
| Crystal Materials | 99,996%, High Purity, Monocrystalline Al2O3 | |
| Grade | Prime | |
| Orientation | C-plane(0001) off M-plane(1-100) 0.2° ± 0.1° | |
| Diameter | 50.8 mm ± 0.1 mm | 100.0 mm ± 0.3 mm |
| Thickness | 430 um ± 15 um | 650 um ± 20 um |
| Primary flat Orientation | A-plane (1 1 -2 0) ± 0.3° | |
| Primary flat length | 16.0 mm ± 1.0 mm | 31.0 mm ± 1.0 mm |
| Front Surface | ≤ 2.5 Å | |
| Back Surface | Fine-ground, Ra =0.5 um - 1.3 um | |
| Pattern Bottom Diameter | 2.4±0.2, 2.5±0.2, 2.6±0.2 um | 2.4±0.2, 2.5±0.2, 2.6±0.2 um |
| Pattern Pitch | 3.0±0.2 um | 3.0±0.2 um |
| Pattern Height | 1.5±0.15, 1.6±0.15, 1.7±0.15 um | 1.5±0.15, 1.6±0.15, 1.7±0.15 um |
| Wafer Edge | R-type/T-type | |
| TTV | ≤ 5 um | ≤ 15 um |
| BOW | - 10 ~ 0 um | - 20 ~ 0 um |
| Warp | ≤ 10um | ≤ 25 um |
| Cleaning/ packaging | Class 100 clean room cleaning and vacuum packaging, 25 pieces in one cassette packaging | |
| Note | We can supply the PSS pattern with dome, cone and triangle. mandydotm at tretrustdotcom |
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